CMP Slurry
Overview of CMP Slurry
We provide "slurry +" solutions that utilize the strengths of our integrated production process, starting from abrasive manufacture through to final slurry, supporting customer design rules and CMP processes.
STI Process/ILD Process CES-330 Series/330F Series/BP Series
As a material solution, we offer Ceria slurry, based on silica-system insulating film added to a high-performance slurry with outstanding level-planarization qualities, material selectivity, and uniformity, and containing abrasive qualities.
AGC Inc. CMP Slurry Page is here